M2和H13钢离子渗氮-电弧镀TiAlCrN膜复合技术

Study on nitriding and multi-arc ion plating on M2 and H13 steel

对M2和H13钢进行离子渗氮-多弧离子镀TiAlCrN膜复合表面改性,并采用电子探针、X射线衍射、扫描电镜、纳米压痕和微米划痕仪等手段分析了薄膜的成分、组织结构与力学性能。结果表明,不同衬底对膜的成分及微观结构影响不大。TiAlCrN/M2和TiAlCrN/H13复合膜的膜基结合力都比较高,而TiAlCrN/M2复合膜的综合力学性能优于TiAlCrN/H13。

The TiAlCrN composite films on M2 and H13 steel substrate were prepared by nitriding and multi-arc ion plating.The composition and microstructure of the films were analyzed by means of electron probe microanalysis（EPMA）,X-ray diffraction（XRD） and scanning electron microscopy（SEM）.The results show that both the films on M2 and H13 steels consist of TiAlCr,CrN and TiAlN layers from inner to outer with a total thickness of 4μm. The similar component and microstructure of TiAlCrN films on different substrate are observed. Both the TiMCrN films on M2 and H13 steel exhibit high hardness and adhesion strength examined by nanoindentation and micorscratch tests, while the TiA1CrN/M2 films have higher Vickers hardness（HV）, adhesion strength and toughness than TiA1CrN/H13 films.