摘要
分析了悬臂梁的静态和动态特性,从理论上给出了提高悬臂梁频率分辨率的办法.在此基础上对6对振动激励和检测机制进行了分析与阐述,并对这些激励和检测机制应用于气体传感器的可行性进行了分析.
The static and dynamic properties of the mcrocantilever are presented in this paper, which provides theoretical ways to improve the sensitivity of mcrocantilever. Six pairs of resonant excited and detecting mechanism are analyzed with examples. The probabilities of applying these mechanisms in gas sensor are also discussed.
出处
《辽宁大学学报（自然科学版）》
CAS
2009年第3期224-227,共4页
Journal of Liaoning University：Natural Sciences Edition
基金
辽宁省教育厅科技项目(编号:20060585)
关键词
微悬臂梁
振动激励和检测
气体传感器
mcrocantilever
resonant excited and detecting
gas sensor.
