浅析折射型微透镜阵列制作方法

The Fabrication Methods of Refractive Microlens Arrays

随着科学技术的进步,当前的仪器设备已朝着光、机、电集成的方向发展。折射型微透镜阵列以其体积小、重量轻、便于集成化、阵列化等优点,而成为新的发展方向。折射型微透镜阵列是一种目前应用十分广泛的微光学元件,它被广泛地应用于光束整形、光学器件互连、三维成像等领域。

With the scientific and technological progress, the current equipment has been moving light, mechanical, electrical integration trend. Refractive microlens array has become the new direction of development. Microlens array is a current application of a very wide range of micro-optical components, it is widely used in beam shaping, optical interconnection devices, three-dimensional imaging and other fields.