摘要
分析了用直接法和比较法测量覆层测厚仪校准厚度片厚度的不确定度来源,并就使用两种测量方法所得结果的不确定度进行了评定。
The factors of uncertainty about film thickness calibration by the two different methods： the direct and the compared methods are analized in this paper the uncertainties of the results of the two methods are evaluated.
出处
《计测技术》
2009年第4期43-45,共3页
Metrology & Measurement Technology
关键词
校准厚度片
覆层测厚仪
测量不确定度
film thickness calibration
coating thickness gauge
uncertainty of measurement
