摘要
TiO2 nanofibers are synthesized via a simple electrospinning method and coated on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. This sensor exhibits high ethanol sensing properties at 300℃. The sensitivity is up to 4 when the sensor is exposed to 1 ppm ethanol, the response time is about 3s, and the recovery is about 5 s.
TiO2 nanofibers are synthesized via a simple electrospinning method and coated on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. This sensor exhibits high ethanol sensing properties at 300℃. The sensitivity is up to 4 when the sensor is exposed to 1 ppm ethanol, the response time is about 3s, and the recovery is about 5 s.