固体吸附热脱附气相色谱质谱法测定半导体行业废气中的VOC_S

Determination of Volatile Organic Compounds in Semiconductor Industry Exhaust Gas Using Active Sampling Onto Sorbent Tubes by GC-MS

采用固体吸附热脱附气相色谱质谱法对半导体行业废气中的VOCs进行了测定，每个分析物质的方法捡出限0．02mg／m^3，回收率73％～123％，线性范围宽。

We mainly measure the concentration of volatile organic compounds in semiconductor industry exhaust gas using active sampling onto sorbent tubes by GC-MS. We get detection limit 0.02mg/m^3 and recovery 73% - 123% ,linearity range broad.