摘要
介绍了一种采用八面体转镜与平面摆镜联合实现激光二维光栅轨迹扫描的扫描器,讨论了光学及机构设计中影响扫描精度的因素,及电机频率/相位稳速控制问题,保证了该扫描器的精度和稳定性。
A scanning mechanism consisting of a nodding mirror and a 8 facet polygan, together scanning a raster form across the total view has been introduced in this paper. The emphases were put on the design consideration for optics and mechanics, the control unit for drive motor, to ensure the accucracy and stability for practical application.
出处
《光学技术》
CAS
CSCD
1998年第5期89-91,共3页
Optical Technique