智能流量定量控制仪的研究

Investigation on the Intelligent Quantified Flow Controller

本文论述了作者对流量定量控制仪的研究成果，提出了一种新的定量控制方法──总脉冲数计数法，它具有极小的控制误差。文中定量分析了进行温度补偿时温度测量的精度要求，还介绍了作者所研制的智能流量定量控制仪的工作原理。

This paper described the results of investigation on quantified flow controller. Inwhich the author presented a new quantified control method - total pulse time countingmethod- Tiny control error will be resulted by using this method. The temperature measurement accuracy needed for compenstion this method was also analysed. Finally, the principle ofintelligent quantified by the author was introducted.