用程差衍射器件实现激光干涉无导轨测距

No Guide Distance Measurement Using Laser and Path Difference Diffraction Element

提出在以半导体激光器为光源的迈克尔逊干涉系统的一臂中，插入一 栅距具特定分布的衍射光栅，使干涉场中各点的光程与待测合作目标的光程成 对应相等的关系，进而可使目标的距离相应地反映于干涉平面上，实现绝对测距 的目的。

A diffraction grating introducing distance distributed is inserted in one arm of the Michelson interferometer system in which light source is the semiconductor laser. The insertion of the diffraction grating make the optical path at different area in the interference field and that of the object which is being measured corresponding equal,thus the distance of the object can make fringe groups in the interference plane.