摘要
详细分析了压电扫描器的机械特性，及其对扫描特性的影响，通过调整输入波形的形式来修正压电扫描器的扫描畸变，从而达到计算机控制压电扫描器扫描的高精度和可控性。压电扫描器的扫描角度能达到３°以上，扫描频率为２０Ｈｚ以上，扫描线性度为 １％。
In this paper,The mechanical characteristics of piezoelectric optical angle scanner(PZTA) and its influence on the scanning quality is detailed. With the computer controlling, we can get high scanning quality by adjusting the input signal style. PZTA can scan more than 3°under ultra-cold environment (100K). The scanning frequency is up to 20Hi and linear is 1 %.
出处
《光学仪器》
1998年第4期28-33,共6页
Optical Instruments
基金
国家863重点资助
