4LIN JianHui1,2,3, WU XiaoMing1,2,3,4, HUANG PengSheng1,2, FENG Lei5, REN TianLing1,2 & LIU LiTian1,2 1 Institute of Microelectronics, Tsinghua University, Beijing 100084, China,2 Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China,3 Yangtze Delta Region Institute of Tsinghua University, Jiaxing 314050, China,4 State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050,China,5 Department of Biomedical Engineering, Tsinghua University, Beijing 100084, China.Development of silicon-based microelectrode array[J].Science China(Technological Sciences),2009,52(8):2391-2395. 被引量:3