高分辨率光纤加速度计

High-Resolution Optical Fiber Accelerometer

设计、研制了一种新型小体积,低成本,易于批量生产的高分辨率光纤加速度计。该加速度探头为全光纤结构,采用相位生成载波(PGC)技术对光纤干涉信号进行调制和解调,获得高精度相位信号。对样机测试结果表明,该高分辨率光纤加速度计在0～100 g的大动态范围内可分辨3×10^(-4) g,最高分辨率可达10^(-6)。其结构采用了一种新颖的由加速度产生位移干涉信号的圆网状弹性结构和硅微镜装置,用Cosmosworks工程软件对该弹性结构进行了应变分析并与实验测试进行对比。整体设计结果与实验测量符合较好。

A novel high-resolution optical fiber accelerometer is developed, featuring compact-size, low-cost and easy to be mass produced. The accelerometer probe has an all-fiber structure. Phase-generated carrier （PGC） technology is adopted to modulate and demodulate the interference signals to obtain a high-resolution phase signal. Measurement of prototype shows the high-resolution optical fiber accelerometer can resolve an acceleration up to 3 ×10^-4 g in 0-100 g dynamic range and the maximum resolution reaches 10 ^-6. The probe consists of a circular mesh flexture and silicon micro-mirror, capable of generating the displacement interference signal under acceleration. Strain analysis of the structure by Cosmosworks and experimental measurement is carried out. The result of the overall design agrees reasonably well with experimental measurement.