摘要
介绍了超薄壁柱腔的制备工艺。在原有制备柱腔工艺基础上，通过对芯轴和镀膜方法的改进，以及对腐蚀溶液及配比的改变，解决了超薄壁柱腔难自立和在腐蚀过程中易破裂的问题，成功地制备出１μｍ左右的超薄壁柱腔。
The fabrication processing of about 1 μm super thin tube targets is presented in this paper. Two methods are used to improve the quality of mandrels. The super thin tube targets which have diameter of 300 μm, thickness of 0 9 μm and diameter of 700 μm, thickness of 1 2 μm have been prepared.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
1998年第4期323-327,共5页
Atomic Energy Science and Technology
