旋转密封环表面二硫化钼膜制备工艺研究

Preparation Technology of Molybdenum Disulfide Coating for Rotating Seal Ring

为解决某传动装置可靠性及寿命问题,在旋转密封环基体表面沉积了一层二硫化钼固体润滑膜,探讨了基体材料预处理工艺和真空室预处理参数,以及沉积工艺参数对其表面二硫化钼镀膜性能的影响,得到了最佳的二硫化钼膜制备工艺。结果表明,烘烤工艺参数为温度350℃,时间30min,真空度3.0×10-2Pa;离子轰击工艺参数为氩气压强4.5Pa,负偏压1000V,时间20min;沉积工艺参数为负偏压200V,钼靶电流200A,混合气体分压1.5Pa时,获得的二硫化钼膜膜层致密,膜基结合强度高。台架试验表明,在旋转密封环基体表面沉积二硫化钼固体润滑膜,明显降低了密封环的摩擦因数。

For solving the reliability and life of a gearing, molybdenum disulfide solid lubrication film was deposited on rolling seal ring. The effect of the pretreatment process of basis material, the pretreatment parameters of vacuum chamber, and the sediment process parameters on the performance of molybdenum disulfide film was discussed. Result shows that, when the firing parameters are 350℃ for 30 min,vacuum degree 3.0 × 10^ -2 Pa,the ion bombardment process parameters are argon pressure 4. 5 Pa, minus bias 1 000 V and time for 20 min, the sediment process parameters are minus bias 200 V, molybdenum target current 200 A, mix gas pressure 1.5 Pa, the deposited molybdenum disulfide solid lubrication film is compact, which has high adhesion strength of coating and substrate. The stand test result shows that the molybdenum disulfide film reduces the friction coefficient of the rotating seal ring.