一种90°分布式MEMS移相器的设计

A 90° Distributed MEMS phase shifter theoretical analysis and numerical simulation

RFMEMS移相器具有传统移相器所无法比拟的体积小、损耗小、成本低、频带宽、易于集成等突出优点。通过在共面波导信号线上贴敷低介电常数的薄层绝缘介质,使得MEMS金属桥与共面波导信号线在"关"态下形成MIM电容的方法,实现了提高"关""开"两种状态下的电容比,从而提高了单位长度上的相移量。在Ka波段下,建立90°分布式MEMS移相器的等效电路,并对其进行了仿真优化,达到要求的技术指标。

RF MEMS phase shifter with the traditional phase shifter unmatched by small size, small loss, low cost, frequency bandwidth, easy-to highlight the advantages of integration. By signaling CPW Online Application low dielectric constant thin layer of insulating medium, making MEMS thin metal bridge surface waveguide signal line in the ＂off＂ state formed under the MIM capacitor ways to enhance the realization of the ＂off＂, ＂open＂ two state capacitance ratio, resulting in improved unit on the length of the phase-shift capacity. In the Ka band, set up distributed MEMS phase shifter equivalent circuit, and carried out a simulation optimization of the required technical specifications.