同步相移干涉表面精密测量

A Synchronism Phase-shifting Interferometry for On-line Precision Surface Measurement

基于激光波面干涉表面形貌测量原理,提出以偏振相移为基础的同步相移技术,研究具有抗振特性的精密表面激光波面干涉测量方案,以解决精密表面加工中的在线在机质量监测问题。介绍同步相移偏振干涉表面测量原理,分析其抗振抗环境干扰特性,构建测量系统实验装置,并完成测试实验。分析和测试实验结果验证了研究的同步相移激光波面干涉测量系统用于在线表面精密测量的良好适应性。

Based on Twyman--Green laser wave interference principle and polarized phase shifting technology, synchronism phase--shifting interference technology was put forward,and a synchronism phase--shifting interferometry with excellent anti--vibraion characterisics was investigated, so that on --line precision surface measurement and quality monitoring problem can be solved. The synchronism phase--shifting interference principle for surface measurement was introduced, its anti--vibration characteristics was analyzed, an experimental system was setup, and testing experiences were conducted. Analysis and experimental testing results show that the synchronism phase--shifting wave interferometry is suitable for on--line precision surface measurement.