一种非旋转对称“花瓣形”相位板的检测系统设计

Optical Design for "Petal" Phase Plate Testing System

提出了利用计算全息图检测非旋转对称的"花瓣"形位相板.分析并推导了光线经过"花瓣"形相位板传播中的高阶像差的理论公式,并以此为指导进行了"花瓣形"相位板的检测系统的设计,给出了设计的结果.讨论了计算全息图衍射级次的分离以及计算全息图的二元化,给出了振幅型的计算全息图的图样.计算全息图的刻线最小间隔是20μm,计算全息图的制作精度对检测结果的波前误差的影响仅仅为0.005λ.对检测系统作了详细的公差分析,结果表明所有调整公差对整个检测系统的影响和方根值为103.187 nm.

Using computer-generated holograms （CGH） to test unsymmetrical ＂petal＂ phase plate is suggested. The expression of the aberration for the ＂petal＂ phase during propagation is analyzed and deduced, and the results of the optical design for the ＂petal＂ surface test system are listed. The separation of the diffraction orders and the binary process of the continuous CGH phase function are discussed and the sample of the amplitude CGH is given. The minimum line spacing of the CGH is 40μm and its effect on the wavefront error is only 0. 005 λ. The tolerance analysis of the testing system is carried out, and the total effect from all alignment tolerances that affect testing system is 104. 293 nm.