摘要
设计了一套测试装置，扩展了扫描电镜／波谱仪的功能。既能作试样的形貌和成份分析，又能对发光器件进行发光颜色和发光强度的测量。
A set of measuring device was designcd in which the SEM/WDS is expandedin fuctions. It is able not only to analyse illuminant-element topograpy and composition,but also measure illuminant colour and intensity.
出处
《激光与光电子学进展》
CSCD
1998年第8期18-20,共3页
Laser & Optoelectronics Progress
关键词
扫描电镜
波谱仪
测试装置
发光器件
SEM/WDS
measuring device
illuminant-element
colour
intensity
