微米光栅加速度计机械性能研究

Research on Mechanical Performance of Grating Accelerometer

介绍了一种微米光栅加速度计及其原理,分析了此加速度计采用的双端固支梁结构的机械性能.利用ANSYS建立其三维实体有限元模型,对在惯性载荷作用下的双端固支梁的机械灵敏度进行了模拟,并对双端固支梁结构进行了模态分析;讨论了各参数变化对灵敏度、固有频率等主要指标的影响程度,并优化了机械结构参数,达到了优化设计的目的.

The micron grating accelerometer was introduced in this paper. The working principle of the aecelerometer were briefly described. The mechanical properties of the two--end fixed beam structure was analysised detaily. And the 3D solid FEA model was built with ANSYS, The sensitivities of the structure was analyzed, and modal analysis of the elastic structure was figured out. Elastic beam was simulated and analysised, Factors which can affect the sensitivity and natural frequency were discussed analysis and simulation were made with ANSYS to achieve optimized design.