摘要
本文介绍 SDS- 2电子束扫描系统的动态快速补偿。它确保了扫描系统的输出线性 ,减小了对偏转放大器高频响应的要求。轴向地址分辨率为 1 5 Bit,扫描场尺寸、旋转和正交性都可以自动调节。在 5 0 - 1 0 0 n S时间内闭合一个开关产生平滑的斜坡 ,使 SDS- 2的扫描速度相当于逐点式扫描电子束系统的 5 0 0 k Hz- 5 MHz。
This paper describes rapid dynamic compensation of the SDS 2 E beam scanning system. It ensures the linearity of E beam scanning system and reduces the requirement to high frequency response of the deflection amplifier. The address resolution is 15 Bit per axis. All the scanning field adjustments are automatic. A smooth ramp is produced by a switch which is closed in 50 100nS period. Scanning speed of SDS 2 E beam scanning system is to equivalent to 500 kHz to 5 MHz of the digital point to point scanning.
出处
《微细加工技术》
1998年第3期37-41,共5页
Microfabrication Technology
关键词
扫描场
高频响应
矢量扫描
电子束扫描系统
补偿
Scanning field
High frequency response
Deflection amplifier
Vector scanning
