直拉硅单晶炉热系统的改造对氧、碳含量的影响

Influence on carbon and oxygen contents in CZ Si single crystals by improvement of thermal system of furnace

为了降低大直径硅单晶生长过程中所引入的氧、碳杂质含量,提高硅单晶质量,特对18英寸直拉硅单晶炉的热系统进行了改进.实验结果表明,通过改变氩气流向和加热器的尺寸的改进型热系统,可降低了硅单晶中的氧、碳含量,缩短拉制晶体时间,降低消耗功率,提高硅单晶质量.图10,表1,参13.

In order to reduce oxygen and carbon contents in czochralski Si single crystal （CZSi） and to improve its quality, the 18# thermal system of furnace is designed and modified. The results indicate as follows： The improving thermal system by changing the pattern of argon flow and the size of heater thermal stove ean lower contents of oxygen and carbon in CZSi, spend less time in crystal growth process with less energy consumption and better crystal quality, lOfigs., ltab., 13refs.