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纳米压痕数据分析的混合方法研究 被引量:1

INVESTIGATION OF HYBRID METHOD FOR ANALYZING NANOINDENTATION DATA
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摘要 在Oliver-Pharr方法的基础上,提出一种新的纳米压痕数据分析方法称为混和方法。该方法通过量纲分析和理论分析,得到压痕过程中相关物理量之间的线性关系,在此基础上通过分析整个加卸载曲线,可实现从少量的压痕试验计算得到随压入深度连续变化的硬度和弹性模量。实验研究验证线性关系是正确的,混合方法是可靠的。 Based on Oliver-Pharr method, a new method for analyzing nanoindentation data was presented, which is called hybrid method. By use of dimensional analysis and theoretical illation, several linear relationships among the variables during nanoindentation were attained, Through analyzing the whole loading-unloading curves, hardness and elastic modulus varying with indentation depth can be measured by a few nanoindentation tests. Reliability of the linear relationships and the hybrid method were verified by experimental investigation.
出处 《机械强度》 CAS CSCD 北大核心 2009年第5期857-860,共4页 Journal of Mechanical Strength
基金 国家自然科学基金(10472113)资助项目~~
关键词 纳米压痕 量纲分析 接触刚度 Nanoindentation Dimensional analysis Contact stiffiness
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参考文献11

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共引文献66

同被引文献13

  • 1周向阳,蒋庄德,王海容,蒋志强.纳米压入法测试薄膜力学性能的若干关键影响因素分析[J].机械强度,2007,29(5):737-744. 被引量:6
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  • 9安涛,文懋,田宏伟,王丽丽,宋立军,郑伟涛.TiN薄膜在纳米压痕和纳米划痕下的断裂行为[J].物理学报,2013,62(13):420-427. 被引量:9
  • 10丁建宁,孟永刚,温诗铸.多晶硅微电子机械构件材料强度尺寸效应研究[J].机械强度,2001,23(4):385-388. 被引量:12

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