摘要
用射频磁控溅射方法在有机柔性衬底上制备出好的附着性、低电阻率、高透射率ZnO∶Al的透明导电膜,研究了薄膜的结构、电学和光学特性.
ZnO:Al transparent conducting thin film with good adhesion,low resistivity and high transmittance has been prepared on the organic substrated by r.f.magnetron sputtering were studied.The structural,electrial and optical properties of film were studied.
出处
《山东大学学报(自然科学版)》
CSCD
1998年第3期271-275,共5页
Journal of Shandong University(Natural Science Edition)