摘要
讨论了关于表面形貌的一种全息式非接触光学测量新方法.此方法采用全息光学元件HOE替代普通光学元件,作为离焦检测元件,提高了测量精度和范围.
A new noncontact holographic optical measuring method of the surface profile was discussed. By using holographic optical element (HOE) to replace the conventional optical element, as a defocusing testing device,measuring precision and range can be improved.
出处
《北方交通大学学报》
CSCD
北大核心
1998年第4期79-82,共4页
Journal of Northern Jiaotong University