摘要
提出采用功率谱密度(PSD)的方法来描述光学元件的"缺陷"分布状况.以数目巨大的微米量级振幅调制型缺陷为例,基于统计思想,得到了光学元件"缺陷"分布等效PSD的求法,并验证了等效求法的合理性.
The method of power spectral density(PSD) to describe defects existing on optical elements was proposed for the first time.An equivalent PSD algorithm was composed for treating the presence of plenty of amplitude-modulating micrometer-siged defects using statistical theory,and the method was validated by simulation.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2009年第9期6279-6284,共6页
Acta Physica Sinica
基金
中国工程物理研究院科学技术发展基金(批准号:2007B08005)资助的课题~~
关键词
功率谱密度
统计分析
等效求法
“缺陷”
power spectral density
statistical analysis
equivalent method
defects