H形直线超声波电动机的研究

Research on Linear Ultrasonic Motor with H-Shape Vibrator

在纵弯复合模态直线超声波电动机的基础上提出一种H形直线超声波电动机,该电机基于H形压电振子两侧金属直梁的一阶伸缩振动模态和三阶面内弯曲振动模态的叠加,在四个驱动足驱动下交替实现力的输出,通过改变两个工作模态相位差来实现速度控制及正、反方向驱动。利用有限元数值方法对振子进行了模态优化设计,确定了振子的结构参数,并加工制作了原理样机,对样机的输出特性进行了实验研究。该模型样机在驱动频率为30.70 kHz时,动子最大速度为230 mm/s,单侧驱动力为0.47 N。

A novel linear ultrasonic motor with H-shape vibrator was proposed,which utilized the first order longitudinal and the third order flexural vibration modes of the H-shape elastic structure. The four drive feet on both ends of the vibrator alternately pushed the sliders to improve motor＇ s output properties. By changing the phase difference of the working modes, the vibrator could drive the sliders to move forward and backward with the same power supply. To obtain minimum frequency difference of the two working modes,the vibrator was optimized by FEM. The prototype was manufactured and its working performances were tested. Its single-side thrust force is 0.47 N and the maximum velocity of the slider is 230 ram/ s with a frequency of 30.70 kHz.