期刊文献+

Experimental study on microdeposition of the copper thin film by femtosecond laser-induced forward transfer

Experimental study on microdeposition of the copper thin film by femtosecond laser-induced forward transfer
下载PDF
导出
摘要 The morphologies of the deposited dots on the 40 nm-thick copper film by the femtosecond laser-induced forward transfer that depend on the irradiated laser fluence have been studied, and the variations of orderliness of the diameter of deposited dots on the quartz substrate and forward ablated dot on the donor substrate with increasing pulse fluence have been obtained experimentally. The experimental results show that a thinner copper film would generate larger-sized ablated dot and deposited dot at the threshold fluence for transfer. By x-ray diffraction measurement, it is demonstrated that the crystal form of the transferred copper films is unaltered and the size of the crystallites is diminished. The morphologies of the deposited dots on the 40 nm-thick copper film by the femtosecond laser-induced forward transfer that depend on the irradiated laser fluence have been studied, and the variations of orderliness of the diameter of deposited dots on the quartz substrate and forward ablated dot on the donor substrate with increasing pulse fluence have been obtained experimentally. The experimental results show that a thinner copper film would generate larger-sized ablated dot and deposited dot at the threshold fluence for transfer. By x-ray diffraction measurement, it is demonstrated that the crystal form of the transferred copper films is unaltered and the size of the crystallites is diminished.
作者 杨丽 王清月
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第10期4292-4297,共6页 中国物理B(英文版)
基金 Project supported by the Key Grant Project of the Ministry of Education of the People’s Republic of China (Grant No 10410) National Natural Science Fundation of China (Grant No 60572168) Science Research Start-up Fund of Civil Aviation University of China (Grant No qd02x11)
关键词 femtosecond laser laser-induced forward transfer thin film ablation DEPOSITION femtosecond laser, laser-induced forward transfer, thin film, ablation, deposition
  • 相关文献

参考文献16

  • 1Zergioti I, Papazoglou D G, Kaxaiskou A, Vainos N A and Fotakis C 2002 Appl. Surf. Sci. 197-198 868.
  • 2Zergioti I, Mailis S, Vainos N A, Fotakis C, Chen S and Grigoropoulos C P 1998 Appl. Surf. Sci. 127-129 601.
  • 3Pique A, Chrisey D B, Auyeung R C Y, Fitz-Gerald J, Wu H D, McGill R A, Lakeou S, Wu P K, Nguyen V and Duignan M 1999 Appl. Phys. A 69 S279.
  • 4Serra P, Colina M, Fernandez-Pradas J M, Sevilla L and Morenza J L 2004 Appl. Phys. Lett. 85 1639.
  • 5Karaiskou A, Zergioti I, Fotakis C, Kapsetaki M, Kafetzopoulos D and Vainos N A 2003 Appl. Surf. Sci. 208-209 245.
  • 6Papakonstantinou P, Vainos N A and Fotakis C 1999 Appl. Surf. Sci. 151 159.
  • 7Zergiotti I, Mailis S, Vainos N A, Papakonstantinou P, Kalpouzos C, Grigoropoulos C P and Fotakis C 1998 Appl. Phys. A 66 579.
  • 8Banks D P, Grivas C, Mills J D, Eason R W and Zergioti I 2006 Appl. Phys. Lett. 89 193107.
  • 9Yang L, Wang C Y, Ni X C, Wang Z J, Jai W and Chai L 2006 Appl. Phys. Lett. 89 161110.
  • 10Mannion P, Favre S, O'Connor G M, Doggett B, Lunney J G and Glynn T J 2005 Proc. SPIE 5827 457.

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部