摘要
提出了一种简单实现PLC直接控制步进电机的方法,设计了直接控制步进电机系统的软硬件。并在反应离子刻蚀机中验证了该方法是可行的,工作可靠。
A method was presented to simply achieve direct control of the step-motor with PLC, and developed the hardware and software of the step-motor direct control system. The method is feasible and workable proved by Reaction Ion Etching.
出处
《电子工业专用设备》
2009年第9期45-48,共4页
Equipment for Electronic Products Manufacturing
