摘要
报告了在离子注入机控制软件建模时使用状态机的原因,以及控制软件的结构、状态机的层次结构和由状态机自动生成代码的方法,并介绍了应用状态机设计开发的离子注入机控制软件的优点。
The reason of using FSM in the ion implanter control software modeling is reported, the construction of control software and the hierarchy of FSM and the method of compiling FSM to C++ programs are reported also, and the advantage of the ion implanter control software designed by using FSM is introduced.
出处
《电子工业专用设备》
2009年第9期49-53,共5页
Equipment for Electronic Products Manufacturing
关键词
有限状态机
层次状态机
建模
FSM(fmite state machine)
HSM(Hierarchy State Machine)
Modeling