新型并联复合式超声波能量传输机构研究

Research on a New Composite Ultrasonic Energy Transmission Mechanism with Parallel Structure

介绍了一种引线键合领域新型并联复合式超声波能量传输机构。与常规其他形式的超声波能量传输机构相比,用减弱了横向偏转刚度的夹持梁代替常规夹持环结构进行机构有效夹持,可显著降低并联结构的耦合特性。对一体式变截面三段变幅杆的杆长进行了优化设计,从理论上推导了复合振动平均能量密度公式。通过理论分析、有限元仿真及实验证明,此结构可有效提高振幅输出,增大超声波能量密度;通过调节双向振动参数在更大面积范围内完成原子键键合,从而减少键合时间,提高键合效率和强度。

This paper focuses on a kind of new composite ultrasonic energy transmission mechanism with parallel structure in wire bonding process. Compared with the traditional ultrasonic energy transmission mechanism, the new one replaces the conventional clamping ring with the clamping beam weakened the horizontal deflection stiffness, which can obviously reduce the coupling characteristics of the parallel structure. The length of the three-section amplitude-conversion pole with integration section-conversion is designed optimally and the average energy density formula of the composite vibration is theoretically derived. Through the theoretical analysis and experimental demonstration, it indicates that the parallel structure can increase the amplitude magnitude of the ultrasonic horn and the ultrasonic energy density, at the same time it can also perform the bonding to a large extent by adjusting the parameters of bidirectional vibration. Therefore, the bonding time is reduced and the bonding efficiency and strength are improved.