摘要
介绍了二氧化钒的两种晶胞结构、相变机理,综述了降低其相变温度的各种掺杂元素、掺杂工艺,介绍了各种衬底、退火温度对钒价态和薄膜相变的影响,最后对二氧化钒的应用前景进行了展望。
The phase transition mechanism and the two kind of crystal cell structure of vanadium dioxide are introduced in the present paper. The different doping element and doping methods for lowering the transition temperature are summarized, and the influences of different base and its annealing temperature on the transition temperature and vanadium valence state are introduced. The future applications of VO2 thin films are also prospected.
出处
《中国陶瓷》
CAS
CSCD
北大核心
2009年第10期22-25,共4页
China Ceramics
关键词
二氧化钒薄膜
掺杂
相变
制备
Vanadium dioxide thin fiims, Phase transition, Doping, Preparation
