微小凹坑阵列的电解转印加工试验研究

Experimental Study of Machining Array Micro-pits in Electrochemical Machining Method with a Mask onto the Cathode

研究表明,合理的表面织构可改善活塞汽缸中摩擦副的润滑特性,提高抗磨减摩性能。试验了用电解转印法加工凹坑阵列,对加工中阴阳极之间的封闭区域建立数学模型,并进行了ANSYS电场分析。试验研究了阴极掩模胶膜厚度、加工间隙、加工电压对微坑形貌的影响,通过优化加工参数,提高了微小凹坑阵列的均匀性与微坑加工精度。采用光刻工艺制备了直径为10μm、厚度为40μm的阴极掩模,以此进行电解转印加工,可获得平均直径为140μm、深度为30μm的凹坑阵列。

It has been identified that the reasonable surface texturing can p romote friction characteristics of a lubricating film in the cylinder piston. In this paper, an electrochemical machining method with a mask onto the cathode is employed to produce the micro-pits array patterns. The mathematical model of the enclosed area between the cathode and anode is established for the ANSYS analysis of the electric field. The effects of the cathode film thickness, the processing voltage, and the cathodeanode gap on the profile of micro-pits are investigated. The micro-pits array can be acquired with a average diameter of 140 μm and depth of 30μm while electrochemical machining was employed by using the cathode mask with a hole diameter of 100 μm and thickness of 40 μm.