节流孔特性对抑制气浮工作台自激振动的效果研究

The Effect of Orifice Characteristics on Reducing Self excited Vibration of Aerostatic x y Stage

以前期研究工作为基础，分析了气浮式工作台由于微小自激振动的产生，而引起其定位精度劣化的内在原因。提出了通过减小节流孔孔径，改变节流孔结构形式等方法来抑制工作台自激振动的技术方案，并对其进行了理论计算和实验验证，结果表明采用这种方法可以取得良好的效果。

Based on the previous work,this paper analyses the reason for small self excited vibration of the aerostatic x y stage,which reduce the positioning accuracy.The technical scheme of controlling self excited vibration of x y stage is proposed by reducing the orifice diameter and changing its structure.After theoretical calculation and experimental validation,the above method can achieve a good effect on reduction of self excited vibration.