高分辨掠入射软X射线-真空紫外单色仪

High Resolution Grazing Incidence Soft X-ray and VUV Monochromator

介绍了用于束箔光谱实验中研制的一台高分辨掠入射软Ｘ射线－真空紫外单色仪基本原理及仪器组成，给出了仪器性能的测试及初步实验结果。

This paper introduces the principle and the instrument of a high resolution grazing incidence soft x ray and VUV monochromator for beam foil spectroscopy experiment. Test results of instrumental performances and spectral experiments are presented.