单晶硅片的低温抛光技术

Cryogenic Polishing Technology of Monocrystalline Silicon Wafer

介绍了一种光学材料抛光新技术——低温抛光技术。首先把抛光液冷冻成低温抛光模层，并对单晶硅片做抛光实验，实验结果表明这是一种很好的光学材料抛光方法。

This paper presents an optical polishing technology cryogenic polishing technology.The polishing liquid is frozen into polisher layer at low temperature at first and then polishing experiments on monocrystalline silicon are taken.It has been shown that this technology is a good new way to polish optical materials.