衬底温度对超声喷雾法制备大面积绒面SnO_2：F薄膜特性影响的研究

Effects of substrate temperature on the characteristics of large-area textgured SnO_2:F films preparated by ultrasonic spray deposition method

详细研究了衬底温度对超声喷雾热分解工艺制备的大面积绒面SnO2:F薄膜的影响和薄膜微结构与薄膜电学、光学性能之间的关系。试验曲线和SEM图的研究结果表明,将衬底温度从370℃提高到470℃以上薄膜结晶程度大大提高,晶粒尺寸明显增大;温度在470℃左右绒度达到13%。文章同时对超声喷雾热分解工艺制备大面积绒面SnO2:F薄膜做了工艺探索,并将实验制得的薄膜用于制备非晶硅薄膜电池,其效率达到了6.46%。

Abstract： The large-area textured SnO2 ：F films are prepared by ultrosonie spray deposition method at 400 mm× 400 mm glass substrate. Thed effects of different suhstrate temperature on the characteristics of the thin films and the relations between microstructure of the films and performance of eleetrics and optical are studied. The results indicate that the film crystallization the grain size of films increase when the substrate temperature increases from 370 ℃ to 470 ℃ ,and the texture achieves 13% at substrate temperatue 470 ℃. The thin films are used as the electrode of a-Si solar cells,and the conversion efficiency reaches 6.46%.