原子力显微镜探针自动逼近系统设计与应用

Design and Application of Auto-feeding System for Atomic Force Microscopy Probe

设计出一套能独立运作的原子力显微镜(AFM)探针自动逼近系统,可广泛应用于大部分原子力显微扫描系统的独立开发。逼近过程中,通过VB的串口通讯发送指令控制单片机采集AFM微悬臂梁的偏转信号,并传送到计算机进行分析显示,实时监测探针与样品之间的作用力,最终实现探针的自动逼近。该系统可与多种相关原子力显微镜设备组合应用,达到个性化多功能检测的目的。

Atomic Force Microscope （AFM）, one of the most effective and important means of testing and processing in nanometer technology, is receiving increasing popularity in applications related with nanometer technology. The current trend of development of AFM involves its composite function. Direct observation of the surface of the nano-scale morphology is not the only thing AFM can do, it also supports nanofabrication, biological materials testing and even the mechanical property test for nanostructures. Therefore, design and development of a multifunctional AFM system is becoming a demand. The auto feeding system, as a part of the whole AFM system, plays a very important role. In this paper, an auto-feeding system for AFM probe is designed, which can be widely used in the independent development of AFM scanning system. It can not only reduce the manufacturing costs of AFM, but also contribute to the extended applications of AFM. Single chip and A/D converter are utilized as its front-end system, and the data collected from A/D is sent to PC through RS-232 serial port, meanwhile, Visual Basic is applied to deal with data analysis and processing, and finally to realize the automatic control of the stepper motor for AFM scanning. The system can work with SIS AFM head stably, and they can provide users the access to personalized multi-function measurements.