摘要
Three types of plasma ion sources designed, manufactured and optimized in the Accelerators and Ion Sources Department, Nuclear Research Center, Atomic Energy Authority are introduced. Different means were investigated to generate the discharge current and ion beam current extracted from the plasma. The various plasmas described include a DC glow discharge plasma, an arc discharge plasma and a radio frequency discharge plasma.
Three types of plasma ion sources designed, manufactured and optimized in the Accelerators and Ion Sources Department, Nuclear Research Center, Atomic Energy Authority are introduced. Different means were investigated to generate the discharge current and ion beam current extracted from the plasma. The various plasmas described include a DC glow discharge plasma, an arc discharge plasma and a radio frequency discharge plasma.