摘要
本工作用OMA系统和高分辨单色仪同时测量了硅烷激光等离子体和放电等离子体的发光谱以及两种等离子体条件下的SiH A^2△——X^2Ⅱ跃迁0——0带光谱。讨论了SiH 0——0带光谱在两种等离子体内的区别。
The emission spectra and rovibronic spectra of siH A_2△--X_2Ⅱ transition weremeasured with OMA system and a high resolution monochromator under two condi-tions of laser-induced and discharge plasma of silane.The results show that the spec-tra of SiH discharge presented all the rovibronic structure but the spectra whichappears in the latter case was seriously simplified. The origin of this discrepancy isdiscussed, which leads to an assumption that it might come from the exsistance ofa probable selectivity in the excited states of SiH and strong broadening mechanismin the laser-induced silane plasma.
出处
《量子电子学》
CSCD
1990年第4期339-343,共5页
基金
国家自然科学基金