压阻式高频动态高压传感器设计

Design of Silicon Piezo-resistive High Frequency Dynamic High Pressure Sensor

阐述了压阻式高频动态压力传感器的设计与开发。用MEMS技术设计的周边固支圆平膜片微型敏感元件具有高达数百千赫兹的固有频率，刚性键合及低桥阻确保了亚微秒级的上升时间，背面承压的平面结构及无管腔齐平封装设计是高频响特性实现的关键。

This paper introduced the design and development of silicon piezo-resistive high frequency dynamic pressure sensor. The minia- ture sensing element of circular flat diaphragm with fixed edge has hundreds kHz natural frequency adopting the MEMS technology. The rigidity bonding and low bridge resistance assure the sub-microsecond rise time. The plane structure with back bearing pressure and the design of no cavi- ty flat package are the key essential realizing the high frequency characteristic.