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微波等离子体化学气相沉积法制备的新型纳米片状碳膜(英文) 被引量：1

New-style Nano-sheets Carbon Films Fabricated by Microwave Plasma Chemical Vapor Deposition
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摘要 在甲烷和氢气的混合系统中,利用石英管型微波等离子体化学气相沉积方法,在硅片上制备了新型的纳米片状碳膜.利用场发射扫描电子显微镜和拉曼光谱仪对碳膜的结构进行了表征,结果表明碳膜是由长1μm、宽100 nm的纳米碳片相互缠绕而成.最后简单讨论了新型碳纳米片的形成机理. A new-style carbon films was prepared on Si wafers by means of a quartz-tube-type microwave plasma chemical vapor deposition（MWPCVD） method with a hydrogen-methane gas mixture. The structure of the carbon films was characterized by field emission scanning electron microscopy （FESEM） and Raman spectroscopy. It was indicated that the carbon films were composed of nano-structured carbon sheets with about 100 nm width and 1μm length and complicatedly twisted. The formation mechanism of the carbon nano- sheets was simply discussed.
作者 金哲 顾广瑞
机构地区 延边大学理学院物理系
出处 《延边大学学报（自然科学版）》 CAS 2009年第3期223-226,共4页 Journal of Yanbian University（Natural Science Edition）
关键词 碳膜 纳米片 微波等离子体化学气相沉积 场发射扫描电子显微镜 拉曼光谱 carbon films nano-sheets MWPCVD FESEM Raman spectra
分类号 O613.71 [理学—无机化学]
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参考文献23

  • 1Yamamoto A, Tsutsumoto T. Piezoresistive Effect of CVD Polycrystalline Diamond Films [J]. Diamond and Related Materials, 2004, 13 (4-8): 863- 866.
  • 2Choi B K, Kang W P, Davidson J L, et al. CVD Diamond Photoconductive Devices[J]. Diamond and Related Materials, 2004,13 (4-8) : 785-790.
  • 3Olsen R H, Aspinwall D K, Dewes R C. Electrical Discharge Machining of Conductive CVD Diamond Tool Blanks [J]. Journal of Materials Processing Teejnology, 2004,155-156 : 1227-1234.
  • 4Kenji K H, Masayuki Y, Gernot F. Application of DLC Films as Masks for Integrated Circuit Fabrication[J].Diamond and Related Materials, 2003,12 (3-7) : 1013-1017.
  • 5Choy K L, Felix E. Functionally Graded Diamondlike Carbon Coatings on Metallic Substrates [J]. Materials Science and Engineering A, 1999,278 (1- 2) : 162-169.
  • 6Monteiro O R, Delplancke-Ogletree M P. Investigation of Non-hydrogenated DLC: Si Prepared by Cathodic Arc[J]. Surface and Coatings Technology, 2003,163-164;144-148.
  • 7Vivien L, Lancon P, Rjehl D, et al. Carbon Nanotubes for Optical Limiting [J]. Carbon, 2002, 40 (10) : 1789-1797.
  • 8Popov V N. Carbon Nanotubes: Properties and Application[J]. Materials Science and Engineering R, 2004,43 (3) : 61-102.
  • 9Filip V, Nicolaescu D, Tanemura M, et at. Model ing the Electron Field Emission from Carbon Nano tube Films[J]. Ultramicroscopy, 2001,89(1-3) :39-49.
  • 10Nakada K, Fujita M, Dresselhaus G, et al. Edge State in Graphene Ribbons: Nanometer Size Effect and Edge Shape Dependence [J]. Phys Rev B, 1996,54:17954-17961.

二级参考文献10

  • 1Rusli A,Yoon S F,Yang H,Ahn J,Zhang Q,Wu Y S,New W L. Journal of Applied Physiology . 1998
  • 2Ye F,Xie E Q,Li R S,Lin H F,Zhang J,He D Y. Acta Physica Sinica . 2005
  • 3Chen L,Zhang G M,Wang M S,and Zhang Q F. Chinese Physics . 2005
  • 4Yuan G,Guo D B,Gu C Z,Dou Y,Song H. Acta Physica Sinica . 2007
  • 5Zhang Y B,Lau S P,Huang L,Sun Z,Tay B K. Diamond and Related Materials . 2004
  • 6Li J,Zheng W,Gu C,Jin Z,Zhao Y,Mei X,Mu Z,Dong C,Sun C. Carbon . 2004
  • 7Mao D S,Wang X,Liu X H,Li Q,Xu J F. Diamond and Related Materials . 2000
  • 8Rusli A,Yoon S F,Yang H,Zhang Q,Ahn J,Fu Y L. Journal of Vacuum Science Technology A Vacuum Surfaces and Films . 1998
  • 9Gupta S,Pal C M,Pal A K. Applied Surface Science . 2004
  • 10Li J J,Gu C Z,Peng H Y,Wu H H,Zheng W T,Jin Z S. Applied Surface Science . 2005

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延边大学学报（自然科学版）
2009年 第3期

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