热丝CVD法制备大面积高质量自支撑金刚石厚膜

Preparation of free-standing diamond thick films of large area and high quality using hot-filament CVD method

采用热丝CVD方法,在Ф110mm的钼基体上,以丙酮为碳源,在高纯氢的作用下,成功地合成了高质量自支撑金刚石厚膜。X射线、SEM和拉曼光谱分析表明,所合成金刚石厚膜质量均匀,晶体单一、完好、纯度高,生长速度快,已接近制备实用化的金刚石膜的要求。

High quality free-standing diamond thick films have been synthesized successfully on Φ110mm Mo substrate by using the hot-filament CVD method,in which using gaseous acetone as carbon source and under the action of high purity H2. From the measurements,it is found that the quality of diamond thick films produced using the method has reached the results reported at home and abroad.