摘要
利用高分子共混物的微相分离和自组装原理,制备出具有纳米微孔的PMMA薄膜,以此为掩膜对发光二极管(LED)表面进行湿法腐蚀,得到表面微结构,并研究了腐蚀时间对表面形貌的影响。测试结果表明,当微孔直径在500nm左右、腐蚀深度约140nm时,所得到的表面微结构能使LED在20mA的注入电流下光功率平均提高18%。
Based on the micro-phase separation and sell-assembly of polymer blends, a mask, in which many nano-holes distribute regularly, is developed from PS/PMMA blend film to fabricate mierostructure on GaP surface by wet etching. By employing this method on LED surface, when the diameter of the nano-holes in mask is around 500nm and the etch depth is 140nm, the LED output power increases by 18% in average.
出处
《光电子.激光》
EI
CAS
CSCD
北大核心
2009年第5期580-582,共3页
Journal of Optoelectronics·Laser
基金
国家"863"计划资助项目(SQ2007AA03Z431230)
北京市人才强教计划资助项目(05002015200504)