硼含量对Ti-B-N纳米复合涂层显微结构与性能的影响

Effect of Boron Content on the Microstructure and Properties of a Nanocrystalline Composite Ti-B-N Coating

将硼加入Ti－N涂层，使用活化离子镀制备出了硼含量为（5～16）at％的Ti－B－N涂层，并着重研究了硼含量对Ti－B－N涂层结构与性能的影响。EPMA与AES分析表明，Ti－B－N涂层元素Ti、B、N在涂层内分布均匀，但在膜／基界面处有一界面扩散区。TEM显微分析表明，Ti－B－N涂层为致密微细的纳米晶多相复合结构，晶粒度不超过50nm。XRD与XPS综合分析表明，Ti－B－N涂层主要由面心立方TIN、简单正交TiB、立方BN与简单六方Ti－B－N相组成，且随着硼含量的增加，含硼相含量增加。Ti－B－N涂层的硬度、韧性与附着强度等力学性能比相应的Ti－N涂层要好得多，且其沉积温度更低。

By adding of boron to the Ti-N coating, Ti-B-N coatings with boron contents from 5% to 16 % have been deposited on steels using activated ion plating. The effect of boron content on the microstructure and the properties of the Ti-B-N coating have been studied. A diffusion zone exists at the coating/substrate interface. TEM analysis indicates that the coating has a dense nanocrystalline composite structure and a crystal size smaller than 50 urn. The phase composition of the coating is fee TiN, simple orthorhombic TiB, cubic BN and simple hexagonal Ti-B-N. The mechanical properties, such as microhardness, toughness adhesion and sliding friction coefficient of the Ti-B-N coating are much better than those of the Ti-N coating, and the deposition temperature is much lOwer than that for the Ti-N coating.Correspondent: Yang Qiaoqin, Ph. D, Associate Professor, Material Test & Research Centre, Hunan University, Changsha 410083,P. R. China, Tel: 086-731-8822663