摘要
报道了热钯丝在低压硅烷气氛下的奇异行为，并给出了初步的解释。揭示了常规热丝法薄膜淀积工艺中热钨丝易断裂的原因。
An anomalous behavior of hot palladium wire in the atmosphere of silane at low pressure was reported and preliminarily explained. The reason why tungsten wire is easy to break in the silicon thin film deposition process by hot wire deposition method was explained.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
1998年第6期453-456,共4页
Chinese Journal of Rare Metals
关键词
热丝淀积法
薄膜硅淀积
固体异常核反应
热钯丝
Hot wire deposition method, Silicon thin film deposition, Anomalous nuclear reaction in solid
