双腔室空气弹簧性能研究

Performance analysis of dual-chamber pneumatic vibration isolator

在超精密加工/检测、IC制造及光学领域中,隔振器已经成为了许多设备的必要子系统,它能够对自地面或负载的振动进行隔/减振,有助于保证设备实现最终的设计精度。在众多的隔振器中,空气弹簧以其性价比高得到了广泛地应用,其固有频率基本不依赖于负载。在C.Erin的研究基础上,将节流孔数目参数引入,通过推导得到了空气弹簧的改进理论模型,并在此基础上分析了腔室、节流孔及或活塞等结构参数对空气弹簧动力学性能的影响,有助于进行结构的优化设计,同时得出在节流孔板高度即节流孔长度限制的条件下,减小节流孔直径并增加节流孔数量会提供较好的阻尼效果。最后通过试验验证了理论分析的结果,为以后的深入被动及主动隔振器的研究打下了基础。

Vibration isolator can insulate or weaken vibration from the ground or load and it helps to ensure the desired ultimate precision. Therefore,vibration isolator has been widely applied in lots of subsystems which are used in the field of ultra-precision machining,inspection and optics. Among most of vibration isolators,pneumatic vibration isolator is very popular due to its high cost-efficiency ratio and its natural frequency doesn't depend on the load. Based on C. Erin's study,orifice number as a parameter was introduced and the theoretical model of air bearing through derivation was improved. Then,Structural parameters of chamber,orifice and piston were analyzed to assist structural optimal design. Meanwhile,it was concluded that if the length of orifice was unchanged,decreasing the diameter of orifice and increasing the number of orifice would provide better damping effect. Finally,the theoretical analysis results were verified by experiments. This study laid the foundation for in-depth study on passive and active vibration isolator in the future.