摘要
针对准分子激光的特点,利用透镜阵设计了一种准分子激光均束系统。其能量均匀度误差优于±5%,满足了准分子激光掩模投影加工和激光辐照的光束质量要求。
Based on the characteristics of excimer laser beam, By using lens array a homogenizer system for exeimer laser is designed. The intensity variation coefficient is under ±5%, which makes it adapt to mask projecting micro-machining of excimer laser and irradiation.
出处
《长春理工大学学报（自然科学版）》
2009年第2期224-226,共3页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
总装备部资助项目
关键词
准分子激光
透镜阵
均束
excimer laser
lens array
homogenizer
