双层辉光沉积TiN涂层的力学性能研究

Study of Mechanical Properties of TiN Coatings by Double Glow Discharge Plasma Process

采用双层辉光离子渗金属技术,在硬质合金YG8基体表面上沉积TiN涂层,通过外观、宏观性能和显微硬度等分析测试,研究了源极到阴极距离、基体温度、辉光放电气压对TiN涂层性能的影响.结果表明：TiN涂层的致密度、均匀性主要受源极到阴极距离的影响,其结合力主要取决于基体温度,而＂边缘效应＂则主要与辉光放电气压密切相关.双层辉光沉积TiN涂层的优化工艺参数为源极到阴极距离10~12 mm,基体温度750~850℃,气压280~340 Pa,所沉积TiN涂层的最高显微硬度可达2 356 HV0.05.

TiN coatings were directly deposited on the surface of hard alloy tools （YG8） using the double glow surface alloying technique. The influence of processing parameters on mechanical properties of TiN coatings was investigated based on surface appearance, microstructure and microhardness. The density and homogeneity of TiN coatings are influenced by the distance of source and cathode, and binding force depends on the suhstrate temperature, while edge domino effect is closely related to the pressure of glow discharge. The processing parameters by double glow discharge are optimized and found to be： substrate temperature 750-850 ℃, pressure 280-340 Pa, distance of source and cathode 10-12 mm, respectively. All the samples appear edge domino offect in different processing conditions and the maximum microhardness of TiN coatings can reach to 2 356 HV0.05.