电子束曝光机束径和束流最佳配合研究

Study on the Best Match of the Beam Spot and the Beam Current of Electron-Beam Exposure Machine

文中介绍了电子束曝光机束斑直径和束流大小的测量方法,提出调整束斑直径的基本原理,设计了一种实现束径和束流最佳配合的自动测量和调整系统。

In this paper,a measurement meant of the beam spot and the beam current of the electron-beam exposure machine are presented,a theory of the beam spot modification is presented,Designed a system for the automatic measurement .modification of the beam spot and the beam current.