摘要
针对石英谐振式称重传感器的结构特点，对导致传感器产生失效的机理进行了分析。结合实验数据，确定了传感器的主要失效应力及失效表现形式，并进一步对传感器的可靠性进行了评估。分析和实验结果证明，将体声波石英谐振器用于结构式称重传感器的开发与生产是完全可行的，具有很好的发展前景。
Based upon the structure of a quartz resonant weighing sensor, failure mechanism is analyzed. Combined with experimental data, the main failure reason and its representation mode is confirmed. Furthermore, the reliability of the sensor is estimated. It shows that production of weighing sensor by bulk acoustic wave quartz resonator is completely feasible and has great foreground.
出处
《压电与声光》
CSCD
北大核心
1998年第6期419-422,共4页
Piezoelectrics & Acoustooptics
基金
国家"九五"攻关项目
